Excimer Laser
MLase Product
Excimer laser systems and integration conditions are reviewed for medical and industrial OEM equipment.
Excimer laser systems
MLI-ArF Models
193 nm (ArF)
200 Hz · 500 Hz · 1000 Hz
Standard Power (SP) · High Power (HP)
Air Cooled (AC) · Liquid Cooled (LC)
MLI-KrF Models
248 nm (KrF)
200 Hz · 500 Hz · 1000 Hz
Standard Power (SP) · High Power (HP)
Air Cooled (AC) · Liquid Cooled (LC)
MLI-KrFFBG Models
248 nm for FBG (KrFFBG)
200 Hz · 500 Hz · 1000 Hz
Standard Power (SP) · High Power (HP)
Air Cooled (AC) · Liquid Cooled (LC)
OEM Excimer Laser Solution
Free-beam and fiber-coupled delivery
Beam shaping, homogenization, and DOE optics
Electrical and control system interface